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1

Determination of the heat capacity of CMOS layers for optimal CMOS sensor design

Martin von Arx, Oliver Paul, Henry Baltes

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 341 KB

1995

2

Micromachined Resonant Sensors — an Overview

Oliver Brand, Henry Baltes

Journal:

Year:

1998

Language:

english

File:

PDF, 7.67 MB

english, 1998

3

Packaging of CMOS MEMS

Henry Baltes, Oliver Brand, Marc Waelti

Journal:

Microelectronics Reliability

Year:

2000

Language:

english

File:

PDF, 677 KB

english, 2000

4

A high sensitivity CMOS gas flow sensor on a thin dielectric membrane

David Moser, Henry Baltes

Journal:

Sensors and Actuators A: Physical

Year:

1993

Language:

english

File:

PDF, 996 KB

english, 1993

5

CMOS as sensor technology

Journal:

Sensors and Actuators A: Physical

Year:

1993

Language:

english

File:

PDF, 1.51 MB

english, 1993

6

Novel fully CMOS-compatible vacuum sensor

Oliver Paul, Henry Baltes

Journal:

Sensors and Actuators A: Physical

Year:

1995

File:

PDF, 377 KB

1995

7

CMOS-based microsensors and packaging

Henry Baltes, Oliver Brand

Journal:

Sensors and Actuators A: Physical

Year:

2001

Language:

english

File:

PDF, 983 KB

english, 2001

8

A CMOS-compatible device for fluid density measurements fabricated by sacrificial aluminium etching

David Westberg, Oliver Paul, Gert I. Andersson, Henry Baltes

Journal:

Sensors and Actuators A: Physical

Year:

1999

Language:

english

File:

PDF, 2.17 MB

english, 1999

9

Three-dimensional modelling of capacitive humidity sensors

Leena Chandran, Henry Baltes, Jan Korvink

Journal:

Sensors and Actuators A: Physical

Year:

1990

Language:

english

File:

PDF, 421 KB

english, 1990

10

Multi-purpose interface for sensor systems fabricated by CMOS technology with post-processing

Carlos Azeredo Leme, Henry Baltes

Journal:

Sensors and Actuators A: Physical

Year:

1993

Language:

english

File:

PDF, 798 KB

english, 1993

11

Future of IC microtransducers

Journal:

Sensors and Actuators A: Physical

Year:

1996

Language:

english

File:

PDF, 1.34 MB

english, 1996

12

Surface micromachining by sacrificial aluminium etching

Westberg, David, Paul, Oliver, Andersson, Gert I, Baltes, Henry

Journal:

Journal of Micromechanics and Microengineering

Year:

1996

Language:

english

File:

PDF, 778 KB

english, 1996

13

CMOS-Based Tactile Microsensor for Medical Instrumentation

Salo, Tomi, Kirstein, Kay-Uwe, Vancura, Tobias, Baltes, Henry

Journal:

IEEE Sensors Journal

Year:

2007

Language:

english

File:

PDF, 1.04 MB

english, 2007

14

SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Sunday 20 September 1998)] Micromachined Devices and Components IV - Solder-bonded micromachined capacitive pressure sensors

Rogge, Berthold, Moser, David, Oppermann, Hermann H., Paul, Oliver, Baltes, Henry, French, Patrick J., Chau, Kevin H.

Year:

1998

Language:

english

File:

PDF, 4.15 MB

english, 1998

15

SPIE Proceedings [SPIE 1999 Symposium on Smart Structures and Materials - Newport Beach, CA (Monday 1 March 1999)] Smart Structures and Materials 1999: Smart Electronics and MEMS - CMOS integrated microsystems and nanosystems

Baltes, Henry, Brand, Oliver, Varadan, Vijay K.

Year:

1999

Language:

english

File:

PDF, 4.76 MB

english, 1999

16

Smart enumeration in C++: virtual construction, message dispatching and tables

Stefano Taschini, Markus Emmenegger, Henry Baltes, Jan G. Korvink

Journal:

Software: Practice and Experience

Year:

1999

Language:

english

File:

PDF, 125 KB

english, 1999

17

Microsystem Modeling

Jan G. Korvink, Henry Baltes

Journal:

Year:

1996

Language:

english

File:

PDF, 1.71 MB

english, 1996

18

ChemInform Abstract: A NiFeMo Electroplating Bath for Micromachined Structures.

William P. Taylor, Michael Schneider, Henry Baltes, Mark G. Allen

Journal:

Year:

2000

File:

PDF, 29 KB

2000

19

A complementary-metal-oxide-semiconductor-field-effect-transistor-compatible atomic force microscopy tip fabrication process and integrated atomic force microscopy cantilevers fabricated with this process

Mizuki Ono, Dirk Lange, Oliver Brand, Christoph Hagleitner, Henry Baltes

Journal:

Ultramicroscopy

Year:

2002

Language:

english

File:

PDF, 572 KB

english, 2002

20

Metal Oxide-Based Monolithic Complementary Metal Oxide Semiconductor Gas Sensor Microsystem

Graf, Markus, Barrettino, Diego, Taschini, Stefano, Hagleitner, Christoph, Hierlemann, Andreas, Baltes, Henry

Journal:

Analytical Chemistry

Year:

2004

Language:

english

File:

PDF, 641 KB

english, 2004

21

Analytic representation of the silicon absorption coefficient in the indirect transition region

Geist, Jon, Migdall, Alan, Baltes, Henry P.

Journal:

Year:

1988

Language:

english

File:

PDF, 882 KB

english, 1988

22

High accuracy modeling of photodiode quantum efficiency

Geist, Jon, Baltes, Henry

Journal:

Year:

1989

Language:

english

File:

PDF, 1.50 MB

english, 1989

23

Shape of the silicon absorption coefficient spectrum near 163 eV

Geist, Jon, Migdall, Alan, Baltes, Henry

Journal:

Year:

1990

Language:

english

File:

PDF, 847 KB

english, 1990

24

Complementary Metal Oxide Semiconductor Cantilever Arrays on a Single Chip: Mass-Sensitive Detection of Volatile Organic Compounds

Lange, Dirk, Hagleitner, Christoph, Hierlemann, Andreas, Brand, Oliver, Baltes, Henry

Journal:

Analytical Chemistry

Year:

2002

Language:

english

File:

PDF, 637 KB

english, 2002

25

Hb GROENE HART: A NEW Pro→Ser AMINO ACID SUBSTITUTION AT POSITION 119 OF THE α 1-GLOBIN CHAIN IS ASSOCIATED WITH A MILD α -THALASSEMIA PHENOTYPE

Harteveld, Cornelis L., Delft, Peter van, Plug, Rob, Versteegh, Florens G.A., Hagen, Balt, Rooijen, Irene van, Kok, Peter J.M.J., Wajcman, Henri, Kister, Jean, Giordano, Piero C.

Journal:

Year:

2002

Language:

english

File:

PDF, 126 KB

english, 2002

26

Mechanical behavior and sound generation efficiency of prestressed, elastically clamped and thermomechanically driven thin film sandwiches

Paul, Oliver, Baltes, Henry

Journal:

Journal of Micromechanics and Microengineering

Year:

1999

Language:

english

File:

PDF, 372 KB

english, 1999

27

Microsensors between physics and technology

Journal:

Physica Scripta

Year:

1993

Language:

english

File:

PDF, 812 KB

english, 1993

28

Tuning Sensitivity and Selectivity of Complementary Metal Oxide Semiconductor-Based Capacitive Chemical Microsensors

Kummer, Adrian M., Hierlemann, Andreas, Baltes, Henry

Journal:

Analytical Chemistry

Year:

2004

Language:

english

File:

PDF, 355 KB

english, 2004

29

CMOS-based chemical microsensors

Hierlemann, Andreas, Baltes, Henry

Journal:

The Analyst (Royal Society of Chemistry)

Year:

2003

Language:

english

File:

PDF, 2.01 MB

english, 2003

30

Lateral transistor structure optimization with respect to current gain

Ristic, Ljubisa, Baltes, Henry P., Filanovsky, Igor, Briglio, David R., Smy, Tom, Nathan, Arokia

Journal:

Canadian Journal of Physics

Year:

1987

Language:

english

File:

PDF, 213 KB

english, 1987

31

Carrier transport in GaAs Hall-cross devices

Nathan, Arokia, Allegretto, Walter, Baltes, Henry P., Smy, Tom

Journal:

Canadian Journal of Physics

Year:

1987

Language:

english

File:

PDF, 301 KB

english, 1987

32

Differential Antitumor Activity of Aflibercept and Bevacizumab in Patient-Derived Xenograft Models of Colorectal Cancer

Chiron, M., Bagley, R. G., Pollard, J., Mankoo, P. K., Henry, C., Vincent, L., Geslin, C., Baltes, N., Bergstrom, D. A.

Journal:

Molecular Cancer Therapeutics

Year:

2014

Language:

english

File:

PDF, 459 KB

english, 2014

33

SPIE Proceedings [SPIE 1999 Symposium on Smart Structures and Materials - Newport Beach, CA (Monday 1 March 1999)] Smart Structures and Materials 1999: Smart Electronics and MEMS - Discrimination of volatile organic compounds using CMOS capacitive chemical microsensors with thickness-adjusted polymer coating

Koll, Andreas, Kummer, Adrian, Brand, Oliver, Baltes, Henry, Varadan, Vijay K.

Year:

1999

Language:

english

File:

PDF, 1.42 MB

english, 1999

34

CMOS integrated chemical microsensors

Steiner, Franz-Peter, Baltes, Henry

Journal:

tm - Technisches Messen

Year:

1995

Language:

english

File:

PDF, 3.32 MB

english, 1995

35

SPIE Proceedings [SPIE Microelectronic Manufacturing - Austin, TX (Tuesday 18 October 1994)] Manufacturing Process Control for Microelectronic Devices and Circuits - Measurement of discharge impedance for dry etch process control

Bose, Frank A., Patrick, Roger, Baltes, Henry, Sabnis, Anant G.

Year:

1994

Language:

english

File:

PDF, 733 KB

english, 1994

36

Is the femtoamp bipolar transistor DC operation feasible?

Bolliger, Daniel, Popovic, Rade S, Baltes, Henry

Journal:

European Journal of Physics

Year:

1996

Language:

english

File:

PDF, 128 KB

english, 1996

37

SPIE Proceedings [SPIE Micromachining and Microfabrication - Austin, TX (Monday 29 September 1997)] Micromachined Devices and Components III - IC microtransducers: new components with old materials?

Baltes, Henry, Lange, Dirk, Koll, Andreas, Chau, Kevin H., French, Patrick J.

Year:

1997

Language:

english

File:

PDF, 1.58 MB

english, 1997

38

SPIE Proceedings [SPIE 5th Annual International Symposium on Smart Structures and Materials - San Diego, CA (Sunday 1 March 1998)] Smart Structures and Materials 1998: Smart Electronics and MEMS - Flip-chip packaged CMOS chemical microsystem for detection of volatile organic compounds

Koll, Andreas, Kawahito, Shoji, Mayer, Felix, Hagleitner, Christoph, Scheiwiller, D., Brand, Oliver, Baltes, Henry, Varadan, Vijay K., McWhorter, Paul J., Singer, Richard A., Vellekoop, Michael J.

Year:

1998

Language:

english

File:

PDF, 2.69 MB

english, 1998

39

SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Sunday 20 September 1998)] Micromachined Devices and Components IV - Long-term stability of membrane transducers for proximity sensing

Hornung, Mark, Brand, Oliver, Paul, Oliver, Baltes, Henry, French, Patrick J., Chau, Kevin H.

Year:

1998

Language:

english

File:

PDF, 1.03 MB

english, 1998

40

SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Sunday 20 September 1998)] Micromachined Devices and Components IV - CMOS resonant sensors

Brand, Oliver, Hornung, Mark, Lange, Dirk, Baltes, Henry, French, Patrick J., Chau, Kevin H.

Year:

1998

Language:

english

File:

PDF, 4.29 MB

english, 1998

41

SPIE Proceedings [SPIE 5th Annual International Symposium on Smart Structures and Materials - San Diego, CA (Sunday 1 March 1998)] Smart Structures and Materials 1998: Smart Electronics and MEMS - CMOS MEMS technology and CAD: the case of thermal microtransducers

Baltes, Henry, Brand, Oliver, Paul, Oliver, Varadan, Vijay K., McWhorter, Paul J., Singer, Richard A., Vellekoop, Michael J.

Year:

1998

Language:

english

File:

PDF, 4.52 MB

english, 1998

42

SPIE Proceedings [SPIE Asia Pacific Symposium on Microelectronics and MEMS - Gold Coast, Australia (Wednesday 27 October 1999)] Electronics and Structures for MEMS - Stress analysis of a standard CMOS process

Munch, Ulrich, Ziebart, V., Baltes, Henry, Paul, Oliver, Doering, Elko, Bergmann, Neil W., Reinhold, Olaf, Tien, Norman C.

Year:

1999

Language:

english

File:

PDF, 1.11 MB

english, 1999

43

SPIE Proceedings [SPIE Photonics East '99 - Boston, MA (Sunday 19 September 1999)] Chemical Microsensors and Applications II - CMOS-based chemical microsensors: components of a micronose system

Hierlemann, Andreas, Koll, Andreas, Lange, Dirk, Hagleitner, Christoph, Kerness, Nicole, Brand, Oliver, Baltes, Henry, Buettgenbach, Stephanus

Year:

1999

Language:

english

File:

PDF, 1.95 MB

english, 1999

44

SPIE Proceedings [SPIE Santa Cl - DL tentative - Santa Clara, CA (Saturday 15 September 1990)] Advanced Techniques for Integrated Circuit Processing - Fast-injection Langmuir probe for process diagnostic and control

Patrick, Roger, Schoenborn, Philippe, Linder, Stefan, Baltes, Henry, Bondur, James A., Turner, Terry R.

Year:

1991

Language:

english

File:

PDF, 191 KB

english, 1991

45

SPIE Proceedings [SPIE Micromachining and Microfabrication '96 - Austin, TX (Monday 14 October 1996)] Micromachined Devices and Components II - Microsystem CAD

Korvink, Jan G., Baltes, Henry, Chau, Kevin H., Roop, Ray M.

Year:

1996

Language:

english

File:

PDF, 3.57 MB

english, 1996

46

SPIE Proceedings [SPIE 1999 Symposium on Smart Structures and Materials - Newport Beach, CA (Monday 1 March 1999)] Smart Structures and Materials 1999: Smart Electronics and MEMS - On-chip circuitry for a CMOS parallel scanning AFM

Hagleitner, Christoph, Lange, Dirk, Akiyama, Terunobu, Tonin, A., Vogt, Rolf, Baltes, Henry, Varadan, Vijay K.

Year:

1999

Language:

english

File:

PDF, 2.46 MB

english, 1999

47

SPIE Proceedings [SPIE 5th Annual International Symposium on Smart Structures and Materials - San Diego, CA (Sunday 1 March 1998)] Smart Structures and Materials 1998: Smart Electronics and MEMS - Determination of mechanical material properties of piezoelectric ZnO films

Koller, Stefan, Ziebart, V., Paul, Oliver, Brand, Oliver, Baltes, Henry, Sarro, Pasqualina M., Vellekoop, Michael J., Varadan, Vijay K., McWhorter, Paul J., Singer, Richard A., Vellekoop, Michael J.

Year:

1998

Language:

english

File:

PDF, 1.58 MB

english, 1998

48

SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Sunday 20 September 1998)] Micromachined Devices and Components IV - Thin film front protection of CMOS wafers against KOH

Munch, Ulrich, Schneeberger, Niklaus, Paul, Oliver, Baltes, Henry, Doering, Elko, French, Patrick J., Chau, Kevin H.

Year:

1998

Language:

english

File:

PDF, 1.68 MB

english, 1998

49

SPIE Proceedings [SPIE 5th Annual International Symposium on Smart Structures and Materials - San Diego, CA (Sunday 1 March 1998)] Smart Structures and Materials 1998: Smart Electronics and MEMS - CMOS chemical microsensors based on resonant cantilever beams

Lange, Dirk, Koll, Andreas, Brand, Oliver, Baltes, Henry, Varadan, Vijay K., McWhorter, Paul J., Singer, Richard A., Vellekoop, Michael J.

Year:

1998

Language:

english

File:

PDF, 2.00 MB

english, 1998

50

SPIE Proceedings [SPIE Micromachining and Microfabrication '96 - Austin, TX (Monday 14 October 1996)] Micromachined Devices and Components II - Thermoelectric CMOS anemometers

Mayer, Felix, Hintermann, Marcel, Jacobs, Heiko, Paul, Oliver, Baltes, Henry, Chau, Kevin H., Roop, Ray M.

Year:

1996

Language:

english

File:

PDF, 2.76 MB

english, 1996

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